Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D759603 | Chamber of charged particle beam drawing apparatus | Hiroyasu Saito, Yoshinori Nakagawa | 2016-06-21 |
| 9196458 | Charged particle beam drawing apparatus and drawing chamber | Hiroyasu Saito, Yoshinori Nakagawa | 2015-11-24 |
| D722298 | Chamber of charged particle beam drawing apparatus | Hiroyasu Saito, Yoshinori Nakagawa | 2015-02-10 |
| D576647 | Nozzle for vapor-phase epitaxial equipment | Hiroshi Furutani, Michio Nishibayashi | 2008-09-09 |