Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE44179 | Charged particle beam writing method | Takayuki Abe, Tetsuo Yamaguchi | 2013-04-30 |
| 7759659 | Charged particle beam writing method | Takayuki Abe, Tetsuo Yamaguchi | 2010-07-20 |