Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6217716 | Apparatus and method for improving target erosion in hollow cathode magnetron sputter source | — | 2001-04-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6217716 | Apparatus and method for improving target erosion in hollow cathode magnetron sputter source | — | 2001-04-17 |