Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8968503 | Electrostatic chucks and methods for refurbishing same | Alisa Hart, Liza Palma, Alasdair Dent | 2015-03-03 |
| 8597448 | Electrostatic chucks and methods for refurbishing same | Alisa Hart, Liza Palma, Alasdair Dent | 2013-12-03 |