Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8945481 | Microfluidic devices and method for their use | Mark F. Oldham, Kenneth J. Livak, H. Pin Kao, Stephen J. Gunstream, Kevin S. Bodner +3 more | 2015-02-03 |
| 7806983 | Substrate temperature control in an ALD reactor | Tony P. Chiang, Karl Leeser, Jeffrey A. Brown | 2010-10-05 |
| 7318869 | Variable gas conductance control for a process chamber | Tony P. Chiang, Karl Leeser, Jeffrey A. Brown | 2008-01-15 |
| 7189432 | Varying conductance out of a process region to control gas flux in an ALD reactor | Tony P. Chiang, Karl Leeser, Jeffrey A. Brown | 2007-03-13 |
| 6800173 | Variable gas conductance control for a process chamber | Tony P. Chiang, Karl Leeser, Jeffrey A. Brown | 2004-10-05 |
| 6630201 | Adsorption process for atomic layer deposition | Tony P. Chiang, Karl Leeser, Jeffrey A. Brown | 2003-10-07 |