Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6709557 | Sputter apparatus for producing multi-component metal alloy films and method for making the same | Sridhar Karthik Kailasam, Ronald A. Powell | 2004-03-23 |
| 6607982 | High magnesium content copper magnesium alloys as diffusion barriers | Ronald A. Powell, Sridhar Karthik Kailasam, Larry R. Lane | 2003-08-19 |
| 6525829 | Method and apparatus for in-situ measurement of thickness of copper oxide film using optical reflectivity | Ronald A. Powell, Sridhar Karthik Kailasam | 2003-02-25 |
| 6461155 | Method and apparatus for heating substrates in supercritical fluid reactor | — | 2002-10-08 |
| 6319842 | Method of cleansing vias in semiconductor wafer having metal conductive layer | Mukul Khosla, Lap Tam, Ronald A. Powell, Ronald D. Allen, Robert T. Rozbicki +1 more | 2001-11-20 |