Issued Patents All Time
Showing 26–38 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5883016 | Apparatus and method for hydrogenating polysilicon thin film transistors by plasma immersion ion implantation | Shu Qin | 1999-03-16 |
| 5660570 | Micro emitter based low contact force interconnection device | Keith Warner, George B. Cvijanovich | 1997-08-26 |
| 5653811 | System for the plasma treatment of large area substrates | — | 1997-08-05 |
| 5580429 | Method for the deposition and modification of thin films using a combination of vacuum arcs and plasma immersion ion implantation | Ryne C. Allen, Imad Husein, Yaunzhong Zhou | 1996-12-03 |
| 5508227 | Plasma ion implantation hydrogenation process utilizing voltage pulse applied to substrate | Shu Qin | 1996-04-16 |
| 5449920 | Large area ion implantation process and apparatus | — | 1995-09-12 |
| 5442185 | Large area ion implantation process and apparatus | — | 1995-08-15 |
| 5441624 | Triggered vacuum anodic arc | Ryne C. Allen, Zhong-Yi Xia | 1995-08-15 |
| 5441617 | Anodic arc source containment mechanisms | Ryne C. Allen | 1995-08-15 |
| 5302271 | Anodic vacuum arc deposition system | Steven Meassick | 1994-04-12 |
| 5245248 | Micro-emitter-based low-contact-force interconnection device | Keith Warner, George B. Cvijanovich | 1993-09-14 |
| 5220725 | Micro-emitter-based low-contact-force interconnection device | Keith Warner, George B. Cyijanovich | 1993-06-22 |
| 5126163 | Method for metal ion implantation using multiple pulsed arcs | — | 1992-06-30 |