Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7375354 | Ion implanting method and apparatus | Nobuo Nagai | 2008-05-20 |
| 7085674 | Alarm management method and apparatus therefor | — | 2006-08-01 |
| 7034543 | Method of predicting a lifetime of filament in ion source and ion source device | — | 2006-04-25 |
| 6770889 | Method of controlling electrostatic lens and ion implantation apparatus | — | 2004-08-03 |
| 6750462 | Ion implanting method and apparatus | Nobuo Nagai | 2004-06-15 |
| 6614027 | Method of controlling electrostatic lens and ion implantation apparatus | — | 2003-09-02 |
| 6313474 | Method for measuring distribution of beams of charged particles and methods relating thereto | Nobuo Nagai | 2001-11-06 |