Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6232216 | Thin film forming method | Katsuyuki Machida, Hakaru Kyuragi | 2001-05-15 |
| 6092578 | Transferring thin film to a substrate | Katsuyuki Machida, Hakaru Kyuragi, Kazuo Imai | 2000-07-25 |
| 5972780 | Thin film forming apparatus and method | Katsuyuki Machida, Hakaru Kyuragi, Kazuo Imai | 1999-10-26 |
| 4599137 | Method of forming resist pattern | — | 1986-07-08 |