Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5012105 | Multiple-imaging charged particle-beam exposure system | Masaaki Ando, Masaaki Matsuzaka | 1991-04-30 |
| 4974227 | Low-pressure mercury resonance radiation source | Dai Sugimoto, Masami Eishima, Shuzo Hattori, Yoshiyuki Uchida, George J. Collins | 1990-11-27 |