Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6439969 | Apparatus and method of chamfering wafer | Kikuo Koma, Shirou Murai, Michihiro Takata | 2002-08-27 |
| 6332834 | Method and apparatus for grinding a workpiece | Mitsuru Nukui, Shirou Murai, Michihiro Takata, Tetsuo Okuyama, Toyotaka Wada | 2001-12-25 |