Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10697805 | Encoder device, method for measuring moving amount, optical apparatus, exposure apparatus, exposure method and method for producing device | — | 2020-06-30 |
| 10514277 | Measurement method and encoder device, and exposure method and device | — | 2019-12-24 |
| 10132656 | Measurement method and encoder device, and exposure method and device | — | 2018-11-20 |
| 9983028 | Measurement method and encoder device, and exposure method and device | — | 2018-05-29 |
| 9939293 | Encoder device, method for measuring moving amount, optical apparatus, exposure apparatus, exposure method and method for producing device | — | 2018-04-10 |
| 8339612 | Shape-measuring interferometer having low-coherence source conjugate to the examined object | — | 2012-12-25 |