Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11289362 | Suction device, carry-in method, carrier system and exposure apparatus, and device manufacturing method | Go ICHINOSE | 2022-03-29 |
| 10586728 | Suction device, carry-in method, carrier system and exposure apparatus, and device manufacturing method | Go ICHINOSE | 2020-03-10 |
| 10242903 | Suction device, carry-in method, carrier system and exposure apparatus, and device manufacturing method | Go ICHINOSE | 2019-03-26 |