Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6531249 | Reticle blanks for charged-particle-beam microlithography and methods for making same | — | 2003-03-11 |
| 6428937 | Methods for fabricating reticle blanks for use in making charged-particle-beam microlithography reticles, and reticle blanks and reticles formed using such methods | — | 2002-08-06 |
| 6287731 | Methods for making microlithography masks utilizing temperature control | — | 2001-09-11 |
| 5972794 | Silicon stencil mask manufacturing method | — | 1999-10-26 |
| 5912095 | Mask substrate manufacturing methods | — | 1999-06-15 |