MT

Masateru Tokunaga

NI Nikon: 2 patents #1,269 of 2,493Top 55%
Overall (All Time): #2,230,341 of 4,157,543Top 55%
2
Patents All Time

Issued Patents All Time

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
6285437 Method for controlling stages, apparatus therefor, and scanning type exposure apparatus — 2001-09-04
5883702 Stage driving exposure apparatus wherein the number of driving devices exceeds the degrees of freedom of the stage — 1999-03-16