Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9720331 | Liquid immersion member, exposure apparatus, exposing method, method of manufacturing device, program, and recording medium | Shinji Sato | 2017-08-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9720331 | Liquid immersion member, exposure apparatus, exposing method, method of manufacturing device, program, and recording medium | Shinji Sato | 2017-08-01 |