Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10133189 | Liquid immersion member, exposure apparatus, exposing method, method of manufacturing device, program, and recording medium | Shinji Sato | 2018-11-20 |
| 9823582 | Liquid immersion member, exposure apparatus, exposing method, method of manufacturing device, program, and recording medium | Shinji Sato | 2017-11-21 |