Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7416574 | Filter apparatus, exposure apparatus, and device-producing method | Yoshitomo Nagahashi | 2008-08-26 |
| 6762820 | Exposure apparatus and device manufacturing method | Tomoyuki Yoshida, Michinori Hashimoto, Fumio Karibe | 2004-07-13 |
| 6034374 | Thermal infrared sensors, imaging devices, and manufacturing methods for such sensors | Mitsuteru Kimura | 2000-03-07 |