Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10114296 | Driving system and driving method, and exposure apparatus and exposure method | Koichi Sakata | 2018-10-30 |
| 9720335 | Driving system and driving method, and exposure apparatus and exposure method | Koichi Sakata | 2017-08-01 |