Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11013068 | Multilayer heating body | Akifumi Tosa, Yasuhiko Inui, Kaname Miwa | 2021-05-18 |
| 10483136 | Ceramic heater and electrostatic chuck | Naoya Uemura, Kohei Yamamoto | 2019-11-19 |
| 10354904 | Electrostatic chuck | Keisuke Okugawa, Toshihisa Nomura | 2019-07-16 |