Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12191183 | Wafer placement table and method of manufacturing the same | Masaki Ishikawa | 2025-01-07 |
| 12027385 | Ceramic heater | Kenichiro AIKAWA, Hiroshi Takebayashi, Takahiro Ando | 2024-07-02 |
| 12009245 | Member for semiconductor manufacturing apparatus and method for manufacturing the same | Masaki Ishikawa, Kenji YONEMOTO | 2024-06-11 |
| 11837490 | Electrostatic chuck heater | Kenichiro AIKAWA, Hiroshi Takebayashi, Takahiro Ando | 2023-12-05 |
| 11715652 | Member for semiconductor manufacturing apparatus | Masaki Ishikawa | 2023-08-01 |
| 11398401 | Wafer mounting table and method of manufacturing the same | Masaki Ishikawa, Kazuhiro Nobori, Akiyoshi Hattori, Keiichi Nakamura | 2022-07-26 |
| 8540819 | Ceramic heater | Takashi Kataigi | 2013-09-24 |
| 8304701 | Ceramic heater and method for making the same | Yoshinobu Goto | 2012-11-06 |