Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8008602 | Electrostatic chuck heater | Yutaka Mori, Akiyoshi Hattori | 2011-08-30 |
| 7812289 | Ceramic heater | — | 2010-10-12 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8008602 | Electrostatic chuck heater | Yutaka Mori, Akiyoshi Hattori | 2011-08-30 |
| 7812289 | Ceramic heater | — | 2010-10-12 |