Issued Patents All Time
Showing 1–25 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322576 | Member for use in plasma processing device, and plasma processing device provided therewith | Kazuhiro Ishikawa, Shuichi Saito | 2025-06-03 |
| 12283466 | Member for use in plasma processing device, and plasma processing device provided therewith | Kazuhiro Ishikawa, Shuichi Saito | 2025-04-22 |
| 12203161 | Component for plasma processing apparatus and plasma processing apparatus including component | Kazuhiro Ishikawa, Shuichi Saito | 2025-01-21 |
| 12135307 | Sensor element of gas sensor | Ryo Onishi, Yusuke Watanabe | 2024-11-05 |
| 12065727 | Member for plasma processing device and plasma processing device provided with same | Kazuhiro Ishikawa, Shuichi Saito | 2024-08-20 |
| 11948779 | Component for plasma processing apparatus and plasma processing apparatus | Kazuhiro Ishikawa, Shuichi Saito | 2024-04-02 |
| 11885765 | Sensor element | Yusuke Watanabe, Mika Kai, Ryo Onishi, Saki Suzuki | 2024-01-30 |
| 11879865 | Sensor element | Yusuke Watanabe, Mika Kai, Ryo Onishi, Saki Suzuki | 2024-01-23 |
| 11873553 | Component and apparatus of manufacturing semiconductor | Atsushi Yumoto, Tomohiro Sugano, Tetsuo Inoue, Shuichi Saito | 2024-01-16 |
| 11715629 | Plasma processing device member, plasma processing device comprising said plasma processing device member, and method for manufacturing plasma processing device member | Kazuhiro Ishikawa, Shuichi Saito | 2023-08-01 |
| 11592419 | Sensor element for gas sensor | Ryo HAYASE | 2023-02-28 |
| 11579113 | Gas sensor element | — | 2023-02-14 |
| 11579112 | Gas sensor element | — | 2023-02-14 |
| 11572275 | Aluminum nitride film, method of manufacturing aluminum nitride film, and high withstand voltage component | Atsushi Yumoto, Mari SHIMIZU, Tetsuo Inoue, Shuichi Saito | 2023-02-07 |
| 11567033 | Sensor element | Yusuke Watanabe, Mika Kai | 2023-01-31 |
| 11521835 | Plasma processing device member and plasma processing device provided with same | Kazuhiro Ishikawa, Shuichi Saito | 2022-12-06 |
| 11385197 | Sensor element | Yusuke Watanabe, Mika Kai, Tomoya Seimori | 2022-07-12 |
| 11327043 | Sensor element for gas sensor | Atsushi Watanabe, Ryo HAYASE | 2022-05-10 |
| 11111573 | Component and semiconductor manufacturing device | Tetsuo Inoue, Shuichi Saito | 2021-09-07 |
| 10876994 | Sensor element and gas sensor | Mika Murakami, Koichi Masuda, Hironori Sakakibara | 2020-12-29 |
| 10866206 | Sensor element and gas sensor | Mika Murakami, Koichi Masuda, Hironori Sakakibara | 2020-12-15 |
| 10852270 | Sensor element and gas sensor | Mika Murakami, Koichi Masuda, Hironori Sakakibara | 2020-12-01 |
| 10845298 | Method of measuring adhesive strength | Ryo Onishi, Yosuke Adachi | 2020-11-24 |
| 10267762 | Sensor element and gas sensor | Mika Murakami, Koichi Masuda, Hironori Sakakibara | 2019-04-23 |
| 10100413 | Component for plasma apparatus and method of manufacturing the same | Michio Sato, Masashi Nakatani | 2018-10-16 |