| 12315757 |
Stacked structure and semiconductor manufacturing apparatus member |
Asumi NAGAI, Hirofumi Yamaguchi |
2025-05-27 |
| 11845697 |
Composite sintered body, semiconductor manufacturing apparatus member, and method of manufacturing composite sintered body |
Kyohei ATSUJI, Asumi NAGAI, Yuji Katsuda |
2023-12-19 |
| 11548829 |
Dense composite material, method for producing the same, joined body, and member for semiconductor manufacturing device |
Asumi NAGAI, Hirofumi Yamaguchi |
2023-01-10 |
| 11332410 |
Sintered compact, circuit component, and method of producing sintered compact |
Kyohei ATSUJI, Yuji Katsuda |
2022-05-17 |
| 11176496 |
Future prediction simulation apparatus, method, and computer program |
Yasushi Ogawa, Takeshi Kabata |
2021-11-16 |
| 11011404 |
Ceramic structure, member for substrate-holding apparatus, and method for producing the ceramic structure |
Yuji Katsuda |
2021-05-18 |
| 10863587 |
Ceramic structure, method for manufacturing the same, and member for semiconductor manufacturing apparatus |
Kyohei ATSUJI, Yuji Katsuda |
2020-12-08 |
| 10800611 |
Container conveyor system |
Yukinobu Nishino, Koji Kaya, Kotaro Mitsutani, Mitsuo Hashimoto |
2020-10-13 |
| 10631370 |
Member for semiconductor manufacturing apparatus, method for producing the same, and heater including shaft |
Asumi NAGAI, Yuji Katsuda |
2020-04-21 |
| 10293581 |
Bonding material composition, aluminum nitride bonded body, and method for producing the same |
Masashi Goto, Yuji Katsuda |
2019-05-21 |
| 9481813 |
Bonding material composition, aluminum nitride bonded body, and method for producing the same |
Masashi Goto, Yuji Katsuda |
2016-11-01 |
| 9177847 |
Ceramic member and member for semiconductor manufacturing equipment |
Atsushi Watanabe |
2015-11-03 |
| 6691248 |
Method and apparatus for controlling supply of power, and storage medium |
Kazuo Nishijima |
2004-02-10 |
| 5205320 |
Flow rate control unit |
— |
1993-04-27 |
