Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12315757 | Stacked structure and semiconductor manufacturing apparatus member | Asumi NAGAI, Hirofumi Yamaguchi | 2025-05-27 |
| 11845697 | Composite sintered body, semiconductor manufacturing apparatus member, and method of manufacturing composite sintered body | Kyohei ATSUJI, Asumi NAGAI, Yuji Katsuda | 2023-12-19 |
| 11548829 | Dense composite material, method for producing the same, joined body, and member for semiconductor manufacturing device | Asumi NAGAI, Hirofumi Yamaguchi | 2023-01-10 |
| 11332410 | Sintered compact, circuit component, and method of producing sintered compact | Kyohei ATSUJI, Yuji Katsuda | 2022-05-17 |
| 11176496 | Future prediction simulation apparatus, method, and computer program | Yasushi Ogawa, Takeshi Kabata | 2021-11-16 |
| 11011404 | Ceramic structure, member for substrate-holding apparatus, and method for producing the ceramic structure | Yuji Katsuda | 2021-05-18 |
| 10863587 | Ceramic structure, method for manufacturing the same, and member for semiconductor manufacturing apparatus | Kyohei ATSUJI, Yuji Katsuda | 2020-12-08 |
| 10800611 | Container conveyor system | Yukinobu Nishino, Koji Kaya, Kotaro Mitsutani, Mitsuo Hashimoto | 2020-10-13 |
| 10631370 | Member for semiconductor manufacturing apparatus, method for producing the same, and heater including shaft | Asumi NAGAI, Yuji Katsuda | 2020-04-21 |
| 10293581 | Bonding material composition, aluminum nitride bonded body, and method for producing the same | Masashi Goto, Yuji Katsuda | 2019-05-21 |
| 9481813 | Bonding material composition, aluminum nitride bonded body, and method for producing the same | Masashi Goto, Yuji Katsuda | 2016-11-01 |
| 9177847 | Ceramic member and member for semiconductor manufacturing equipment | Atsushi Watanabe | 2015-11-03 |
| 6691248 | Method and apparatus for controlling supply of power, and storage medium | Kazuo Nishijima | 2004-02-10 |
| 5205320 | Flow rate control unit | — | 1993-04-27 |