Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12243729 | Member for semiconductor manufacturing apparatus and method for manufacturing the same | Hiroshi Takebayashi | 2025-03-04 |
| 12238826 | Semiconductor-manufacturing apparatus member and method of manufacturing the same | Hiroshi Takebayashi | 2025-02-25 |
| 12120783 | Ceramic heater | Hiroshi Takebayashi, Daisuke Inoue | 2024-10-15 |
| 11784068 | Member for semiconductor manufacturing apparatus and method for manufacturing the same | Hiroshi Takebayashi | 2023-10-10 |
| 11784078 | Wafer placement apparatus | — | 2023-10-10 |
| 11600510 | Electrostatic chuck heater | — | 2023-03-07 |