Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165855 | Ceramic heater | — | 2024-12-10 |
| 11424150 | Semiconductor manufacturing apparatus member and method for manufacturing the same | — | 2022-08-23 |
| 9438140 | Member for semiconductor manufacturing apparatus | Takashi Kataigi | 2016-09-06 |