Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7309842 | Shielded monolithic microplasma source for prevention of continuous thin film formation | — | 2007-12-18 |
| 7123361 | Microplasma emission spectrometer | — | 2006-10-17 |
| 6396024 | Permanent magnet ECR plasma source with integrated multipolar magnetic confinement | Joel Brad Bailey | 2002-05-28 |
| 6225592 | Method and apparatus for launching microwave energy into a plasma processing chamber | — | 2001-05-01 |
| 6163006 | Permanent magnet ECR plasma source with magnetic field optimization | John E. Spencer | 2000-12-19 |