Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7312140 | Film forming method | Hideaki Machida, Atsushi Ogura, Masato Ishikawa | 2007-12-25 |
| 7045457 | Film forming material, film forming method, and silicide film | Hideaki Machida, Masato Ishikawa, Takeshi Kada | 2006-05-16 |
| 5789321 | Method for forming a barrier metal layer made of titanium nitride on a silicon substrate | — | 1998-08-04 |
| 5515985 | Method of forming fine copper conductor pattern | Nobuki Hosoi | 1996-05-14 |