Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6021359 | Method and apparatus for determining an inspection schedule for a production line | Takako Sakakibara, Yukihiro Muraoka | 2000-02-01 |
| 5930137 | Work supplying method and apparatus to batch process apparatus for semiconductor wafer with preferential treatment to time critical lots | — | 1999-07-27 |
| 5745364 | Method of producing semiconductor wafer | — | 1998-04-28 |