Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6652354 | Polishing apparatus and method with constant polishing pressure | Yoshihiro Hayashi, Takahiro Onodera, Kiyoshi Tanaka, Naoki Sasaki | 2003-11-25 |
| 6270392 | Polishing apparatus and method with constant polishing pressure | Yoshihiro Hayashi, Takahiro Onodera, Kiyoshi Tanaka, Naoki Sasaki | 2001-08-07 |
| 5877088 | Flattening method and apparatus for semiconductor device | Hirohiko Izumi | 1999-03-02 |