Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7564102 | Semiconductor device and its manufacturing method | — | 2009-07-21 |
| 6455204 | X-ray mask and method of fabricating the same | — | 2002-09-24 |
| 6197457 | X-ray mask and method of fabricating the same | — | 2001-03-06 |
| 6066418 | X-ray mask and fabrication process therefor | — | 2000-05-23 |
| 5754619 | X-ray mask for X-ray lithography and method of producing same | Setsu Kotsuji | 1998-05-19 |
| 5635081 | Fabrication method of field-emission cold cathode | — | 1997-06-03 |