ST

Shinichi Takeshiro

NE Nec: 2 patents #5,510 of 14,502Top 40%
Overall (All Time): #2,274,936 of 4,157,543Top 55%
2
Patents All Time

Issued Patents All Time

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
5695602 Process of etching silicon nitride layer by using etching gas containing sulfur hexafluoride, hydrogen bromide and oxygen 1997-12-09
5316980 Method of making a semiconductor device by dry etching process 1994-05-31