Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638141 | Method and apparatus for chemical-mechanical polishing | — | 2003-10-28 |
| 6536455 | Diffusion reactor with sloped bottom plate suitable for cleaning the same | — | 2003-03-25 |
| 6506256 | Method and apparatus for diffusion of an impurity into a semiconductor wafer with high in-plane diffusion uniformity | — | 2003-01-14 |
| 6348397 | Method for diffusion of an impurity into a semiconductor wafer with high in-plane diffusion uniformity | — | 2002-02-19 |
| 6316748 | Apparatus for manufacturing a semiconductor device | — | 2001-11-13 |
| 6241822 | Vertical heat treatment apparatus | — | 2001-06-05 |
| 6004304 | Subcutaneous needle and method of producing the same | Tsuyoshi Suzuki, Masatoshi Yamamoto | 1999-12-21 |
| 5603772 | Furnace equipped with independently controllable heater elements for uniformly heating semiconductor wafers | — | 1997-02-18 |
| 5013692 | Process for preparing a silicon nitride insulating film for semiconductor memory device | Ichiroh Oki | 1991-05-07 |