Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10281821 | Exposure apparatus, exposure method, and device manufacturing method | — | 2019-05-07 |
| 7572558 | Photomask and exposure method | — | 2009-08-11 |
| 7537864 | Hole pattern design method and photomask | Masashi Fujimoto | 2009-05-26 |
| 7295286 | Exposure device and method of exposure | — | 2007-11-13 |
| 6335125 | Photomask and method of manufacturing same | — | 2002-01-01 |
| 6310684 | Method of measuring spherical aberration in projection system | — | 2001-10-30 |
| 6271919 | Semiconductor device and alignment apparatus and alignment method for same | — | 2001-08-07 |
| 6208469 | Method of adjusting reduction projection exposure device | — | 2001-03-27 |
| 6200076 | Cutting tool and method for producing the same | Yasuyoshi Fujii, Kazuhiro Kaneko | 2001-03-13 |
| 6160623 | Method for measuring an aberration of a projection optical system | Takayuki Uchiyama | 2000-12-12 |
| 6084678 | Method of alignment between mask pattern and wafer pattern | — | 2000-07-04 |
| 6058807 | Cutting tool and method for producing the same | Yasuyoshi Fujii, Kazuhiro Kaneko | 2000-05-09 |
| 6037411 | Acoustic vibrational material of fiber reinforcement with epoxy resin and epoxy-reactive polybutadiene | Kunihiko Tokura, Masaru Uryu | 2000-03-14 |
| 6013395 | Photomask for use in exposure and method for producing same | — | 2000-01-11 |
| 5663220 | Acoustic vibrational material from fiber-reinforced polybutadiene-modified epoxy resin | Kunihiko Tokura, Masaru Uryu | 1997-09-02 |