Issued Patents All Time
Showing 26–50 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6372628 | Insulating film comprising amorphous carbon fluoride, a semiconductor device comprising such an insulating film, and a method for manufacturing the semiconductor device | Yoshihisa Matsubara, Ko Noguchi, Shinya Ito, Akira Matsumoto, Takashi Ishigami +5 more | 2002-04-16 |
| 6358802 | Method for manufacturing semiconductor device having a gate electrode film containing nitrogen | — | 2002-03-19 |
| 6320264 | Interconnect wiring with sidewalls and inter-wiring insulation composed of fluorine | — | 2001-11-20 |
| 6316833 | Semiconductor device with multilayer interconnection having HSQ film with implanted fluorine and fluorine preventing liner | — | 2001-11-13 |
| 6313036 | Method for producing semiconductor device | — | 2001-11-06 |
| 6288430 | Semiconductor device having silicide layer with siliconrich region and method for making the same | — | 2001-09-11 |
| 6274476 | Semiconductor device and method of manufacturing the same | Kiyotaka Imai | 2001-08-14 |
| 6211062 | Method for manufacturing semiconductor device having multiple wiring layer | — | 2001-04-03 |
| 6187662 | Semiconductor device with low permittivity interlayer insulating film and method of manufacturing the same | Tatsuya Usami | 2001-02-13 |
| 6091081 | Insulating film comprising amorphous carbon fluoride, a semiconductor device comprising such an insulating film | Yoshihisa Matsubara, Ko Noguchi, Shinya Ito, Akira Matsumoto, Takashi Ishigami +5 more | 2000-07-18 |
| 6091121 | Semiconductor device and method for manufacturing the same | — | 2000-07-18 |
| 6060784 | Interconnection layer structure in a semiconductor integrated circuit device having macro cell regions | — | 2000-05-09 |
| 5994749 | Semiconductor device having a gate electrode film containing nitrogen | — | 1999-11-30 |
| 5990003 | Method of fabricating a semiconductor device | — | 1999-11-23 |
| 5990001 | Method of forming a semiconductor device having a critical path wiring | — | 1999-11-23 |
| 5985750 | Manufacturing method of semiconductor device | — | 1999-11-16 |
| 5976962 | Method of fabricating semiconductor device | — | 1999-11-02 |
| 5955384 | Method of fabricating semiconductor device | — | 1999-09-21 |
| 5930667 | Method for fabricating multilevel interconnection structure for semiconductor devices | — | 1999-07-27 |
| 5883433 | Semiconductor device having a critical path wiring | — | 1999-03-16 |
| 5793113 | Multilevel interconnection structure for semiconductor devices | — | 1998-08-11 |
| 5750437 | Method of fabricating semiconductor device | — | 1998-05-12 |
| 5592023 | Semiconductor device | — | 1997-01-07 |
| 5502335 | Semiconductor device with wiring layer | — | 1996-03-26 |
| 5479053 | Semiconductor device with conductor clad insulator wiring | — | 1995-12-26 |