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Naoaki Aizaki

NE Nec: 3 patents #4,195 of 14,502Top 30%
Overall (All Time): #1,616,255 of 4,157,543Top 40%
3
Patents All Time

Issued Patents All Time

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
6392240 Sample table for pattern exposure machine — 2002-05-21
6091202 Electron beam exposure apparatus with non-orthogonal electron emitting element matrix — 2000-07-18
5932884 Charged-beam exposure system and charged-beam exposure method — 1999-08-03