Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6198109 | Aperture apparatus used for photolithography and method of fabricating the same | — | 2001-03-06 |
| 6103434 | Electron beam direct drawing method, system and recording medium | — | 2000-08-15 |
| 6040583 | Electron beam exposure method using a moving stage | — | 2000-03-21 |
| 5949079 | Method of and an apparatus for electron beam exposure | — | 1999-09-07 |
| 5908733 | Method of electron beam exposure for superimposing second pattern over existing pattern | — | 1999-06-01 |