Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7423745 | Optical inspection apparatus and optical inspection method | Hideyuki Moribe | 2008-09-09 |
| 6665112 | Optical reticle substrate inspection apparatus and beam scanning method of the same | — | 2003-12-16 |
| 6538795 | Optical reticle substrate inspection apparatus and beam scanning method of the same | — | 2003-03-25 |