Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6566036 | Chemically amplified resist | — | 2003-05-20 |
| 6406831 | Chemically amplified resist compositions | — | 2002-06-18 |
| 6342334 | Chemically amplified resist compositions | — | 2002-01-29 |
| 6228558 | Chemically amplified resist | — | 2001-05-08 |
| 6100015 | Resist pattern forming method | — | 2000-08-08 |
| 6096478 | Resist material for forming a chemically amplified negative type resist pattern and method of manufacturing a semiconductor device employing the resist pattern | — | 2000-08-01 |
| 6090522 | Chemical amplification photoresist comprising a reverse reaction inhibitor | — | 2000-07-18 |
| 5965310 | Process of patterning photo resist layer extending over step of underlying layer without deformation of pattern | — | 1999-10-12 |