Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7432169 | Method for manufacturing semiconductor device | — | 2008-10-07 |
| 6303487 | Method for forming an air gap in an insulating film between adjacent interconnection conductors in a semiconductor device | — | 2001-10-16 |
| 6229195 | Semiconductor device with air gaps between interconnections | — | 2001-05-08 |
| 6103591 | Semiconductor device with air gaps between interconnections and method of forming the same | — | 2000-08-15 |