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Method for designing cell layout of semiconductor integrated circuit |
Hironori Iwamoto |
2012-07-24 |
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Method for designing cell layout of a semiconductor integrated circuit with logic having a data flow |
Hironori Iwamoto |
2010-06-08 |
| 7251802 |
Method and system for deciding a wiring route |
Ippei Hachiya, Tetsuo Sasaki, Hiroyuki Suzuki |
2007-07-31 |
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Wiring pattern decision method considering electrical length and multi-layer wiring board |
Hiroyuki Mitome |
2003-10-28 |
| 6627357 |
Reticle |
— |
2003-09-30 |
| 6296925 |
Aperture for charged beam drawing machine and method for forming the same |
— |
2001-10-02 |
| 6288407 |
Electron beam-writing apparatus and electron beam-writing method |
— |
2001-09-11 |
| 5994036 |
Method of forming a resist pattern |
— |
1999-11-30 |
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Electron-beam cell projection lithography system |
— |
1998-07-21 |
| 5593761 |
Electron beam shaping mask for an electron beam system with pattern writing capability |
Hiroshi Yamashita |
1997-01-14 |
| 5557110 |
Aperture for use in electron beam system for pattern writing |
— |
1996-09-17 |
| 5438207 |
Electron beam direct writing system for ULSI lithography with facilitated rotation and gain corrections of shot patterns and electron beam direct writing method for same |
Hiroshi Yamashita |
1995-08-01 |
| 4545670 |
Developing apparatus using magnetic developer |
Shinichi Itoh, Michiaki Otsuki |
1985-10-08 |