Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 5922623 | Hydrogen fluoride vapor phase selective etching method for fabricating semiconductor devices | Hiroaki Tsutsui, Takao Matsumura, Hirokazu Oikawa, Masayuki Yokoi, Junichi Nakamura +1 more | 1999-07-13 | $30,000 |