Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6487503 | Method of estimating shape of chemically amplified resist | — | 2002-11-26 |
| 6449387 | Method for analyzing light intensity distribution | — | 2002-09-10 |
| 6052626 | Parametric analyzing method for calculating light intensity | — | 2000-04-18 |
| 5999720 | Post exposure bake simulation method | — | 1999-12-07 |