Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7396712 | Thin film processing method and thin processing apparatus | Hiroshi Tanabe | 2008-07-08 |
| 7063999 | Thin film processing method and thin film processing apparatus including controlling the cooling rate to control the crystal sizes | Hiroshi Tanabe | 2006-06-20 |