Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7322225 | Adhesion promotion vacuum monitoring system for photo resist coaters | Jason T. Gerbi | 2008-01-29 |
| 6582137 | Polyimide coating process with dilute TMAH and DI-water backrinse | Joseph T. Siska | 2003-06-24 |
| 6551403 | Solvent pre-wet system for wafers | — | 2003-04-22 |
| 6171980 | Polyimide coating process with dilute TMAH and DI-water backrinse | Joseph T. Siska | 2001-01-09 |