Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6741733 | Drawing pattern verifying method | — | 2004-05-25 |
| 6638665 | Method and apparatus for designing EB mask | — | 2003-10-28 |
| 6597001 | Method of electron-beam exposure and mask and electron-beam exposure system used therein | Hiroshi Yamashita | 2003-07-22 |
| 6492070 | Electron beam exposure mask and method for manufacturing electron beam exposure mask | — | 2002-12-10 |
| 6462346 | Mask inspecting apparatus and mask inspecting method which can inspect mask by using electron beam exposure system without independently mounting another mask inspecting apparatus | — | 2002-10-08 |