Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7788197 | Teaching apparatus and method of teaching a wafer carrying apparatus a target position for placing and removing semiconductor wafers on and off a wafer boat using an imaging device and distance sensor | Toshihiro Tooyama | 2010-08-31 |