Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12034050 | CMOS compatible low-resistivity Al—Sc metal etch stop | Giovanni Esteves | 2024-07-09 |
| 11798844 | High aspect ratio gratings fabricated by electrodeposition | Christian Lew Arrington, Amber Lynn Dagel, Patrick Sean Finnegan, Andrew E. Hollowell, Kalin Baca | 2023-10-24 |
| 10651048 | ScAIN etch mask for highly selective etching | Michael David Henry, Erica Ann Douglas | 2020-05-12 |
| 10481672 | Low-power MEMS wakeup system | Benjamin Griffin, Robert William Reger, Sean Yen, Bryson Dean Barney, Andrew Ian Young +3 more | 2019-11-19 |
| 9203134 | Tuning method for microresonators and microresonators made thereby | Michael David Henry, Roy H. Olsson, Karl Douglas Greth, Janet Nguyen, James E. Stevens | 2015-12-01 |