Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7991216 | Method of analyzing effective polishing frequency and number of polishing times on polishing pads having different patterns and profiles | Chein-chung Chen | 2011-08-02 |
| 7958078 | Clustering triz analysis method | Mi-Yung Chen | 2011-06-07 |
| 7747419 | Prediction method of near field photolithography line fabrication using by the combination of taguchi method and neural network | Ching-Been Yang | 2010-06-29 |
| 7716026 | Non-destructive method for inverse-calculating fiber probe aperture size and prediction method of fabrication profile of near field photolithography | Ching-Been Yang | 2010-05-11 |
| 7299107 | Method for analyzing effective polishing frequency and effective polishing times for chemical mechanical planarization polishing wafers with different polishing pad profiles | Chein-chung Chen | 2007-11-20 |