Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8334981 | Orthogonal-polarization mirau interferometry and beam-splitting module and interferometric system using the same | Sheng-Lih Yeh, Liang-Chia Chen | 2012-12-18 |
| 7855791 | Vibration-resistant interferometric scanning system and method thereof | Sheng-Lih Yeh, Liang-Chia Chen | 2010-12-21 |
| 6473443 | System and method for generating a grating image | Chi-Wang Kuo | 2002-10-29 |